Schematic diagram of the principle behind secondary ion mass spectrometry (SIMS).

NanoSIMS uses a finely focused beam of primary ions to erode the sample surface. The secondary ions (atomic and molecular) produced in this process are then analyzed by a mass spectrometer.

Although the basic principle is rather simple, the technical realization for achieving high sensitivity, mass resolution and spatial resolution requires some very sophisticated technology. This technology is put together in an instrument produced by Cameca. In our lab, we operate Cameca’s NanoSIMS 50L model equipped with the standard Cs⁺ ion source and the Hyperion H201 O^– source.

Cameca’s NanoSIMS 50L at Utrecht University.